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Publications (1-5 of 5)

  1. Discussion on Hamaker Constant

    09 May 2008 | | Contributor(s):: Stephen Beaudoin, Ravi Jaiswal, Caitlin Kilroy

    The Hamaker constant is a force constant used for describing the van der Waals (vdW) force. The magnitude of the Hamaker constant reflects the strength of the vdW force between two particles, or between a particle and a substrate. It depends on the material properties of both the interacting...

  2. Roughness models for particle adhesion

    20 Dec 2007 | | Contributor(s):: Stephen Beaudoin, Ravi Jaiswal, Caitlin Kilroy

    The effects of different surface roughness models on a previously developed van der Waals adhesion model were examined. The van der Waals adhesion model represented surface roughness with a distribution of asperities. It was found that the constraints used todefine the asperity distribution on...

  3. Simulation of the Adhesion of Particles to Surfaces

    20 Dec 2007 | | Contributor(s):: Stephen Beaudoin, Ravi Jaiswal, Caitlin Kilroy

    The removal of micrometer and submicrometer particles fromdielectric and metal films represents a challenge in postchemicalmechanical polishing cleaning. Proper modeling of the adhesiveforce between contaminant particles and these films is needed todevelop optimal solutions to postchemical...

  4. Hamaker Constants in Integrated Circuit Metallization

    20 Dec 2007 | | Contributor(s):: Stephen Beaudoin, Ravi Jaiswal, Caitlin Kilroy

    A new method for determining Hamaker constants was examinedfor materials of interest in integrated circuit manufacture. Anultra-high vacuum atomic force microscope and an atomic force microscopeoperated in a nitrogen environment were used to measurethe interaction forces between metals,...

  5. A Theoretical and Experimental Study of Surface Forces in Adhesion of Particles to Thin Films

    20 Dec 2007 | | Contributor(s):: Stephen Beaudoin, Ravi Jaiswal, Caitlin Kilroy

    The interactions between micron- and nano-particles and rough surfaces are of great importance and have numerous applications in surface science and biotechnology. It is essential to have estimates of surface/intermolecular forces between interacting bodies to describe and to manipulate the...