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A Theoretical and Experimental Study of Surface Forces in Adhesion of Particles to Thin Films
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20 Dec 2007 | | Contributor(s):: Stephen Beaudoin, Ravi Jaiswal, Caitlin Kilroy
The interactions between micron- and nano-particles and rough surfaces are of great importance and have numerous applications in surface science and biotechnology. It is essential to have estimates of surface/intermolecular forces between interacting bodies to describe and to manipulate the...
Basic Forces in Particle Adhesion
28 Jan 2008 | | Contributor(s):: Stephen Beaudoin
Particle adhesion to surfaces is important in a wide range of industrial applications. This brief presentation is designed to provide an introduction to the forces that influence particle adhesion in air or liquid environments. It is not designed to provide information at great depth or...
Discussion on Hamaker Constant
09 May 2008 | | Contributor(s):: Stephen Beaudoin, Ravi Jaiswal, Caitlin Kilroy
The Hamaker constant is a force constant used for describing the van der Waals (vdW) force. The magnitude of the Hamaker constant reflects the strength of the vdW force between two particles, or between a particle and a substrate. It depends on the material properties of both the interacting...
Hamaker Constants in Integrated Circuit Metallization
A new method for determining Hamaker constants was examinedfor materials of interest in integrated circuit manufacture. Anultra-high vacuum atomic force microscope and an atomic force microscopeoperated in a nitrogen environment were used to measurethe interaction forces between metals,...
07 Jan 2008 | | Contributor(s):: Stephen Beaudoin, Ravi Jaiswal, Caitlin Kilroy, Dave Balachandran
Particle and Thin Film Adhesion
The adhesion of micron and sub-micron scale particles to surfaces is of tremendous interest in a wide range of industrial and civilian applications. We measure directly the adhesion of particles to surfaces using atomic force microscopy and develop experimentally-validated, science-based models...
Roughness models for particle adhesion
The effects of different surface roughness models on a previously developed van der Waals adhesion model were examined. The van der Waals adhesion model represented surface roughness with a distribution of asperities. It was found that the constraints used todefine the asperity distribution on...
Simulation of the Adhesion of Particles to Surfaces
The removal of micrometer and submicrometer particles fromdielectric and metal films represents a challenge in postchemicalmechanical polishing cleaning. Proper modeling of the adhesiveforce between contaminant particles and these films is needed todevelop optimal solutions to postchemical...